• Guntrade Roll
  • S. Jakschik
  • Matthias Goldbach
  • A. Wachowiak
  • T. Mikolajick
  • Lothar Frey

Analysis of the effect of germanium preamorphization on interface defects and leakage current for high-k metal-oxide-semiconductor field-effect transistor

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 29, 01AA05

(2011)