Publications

Tunable conduction type of solution-processed germanium nanoparticle based field effect transistors and their inverter integration

Physical Chemistry Chemical Physics, 17, 22106–22114

(2015)

 

'Black' TiO2 Nanotubes Formed by High-Energy Proton Implantation Show Noble-Metal-co-Catalyst Free Photocatalytic H2-Evolution

Nano Letters, 15, 6815–6820

(2015)

 
  • Susanne Oertel
  • Michael P. M. Jank
  • Erik Teuber
  • Anton J. Bauer
  • Lothar Frey

High-mobility metal-oxide thin-film transistors by spray deposition of environmentally friendly precursors

Thin Solid Films, 553, 114–117

(2014)

 
  • J. Landwehr
  • Robert Fader
  • M. Rumler
  • Mathias Rommel
  • Anton J. Bauer
  • Lothar Frey
  • B. Simon
  • B. Fodor
  • P. Petrik
  • Andreas Schiener
  • Benjamin Winter
  • Erdmann Spiecker

Optical polymers with tunable refractive index for nanoimprint technologies

Nanotechnology, 25, 505301

(2014)

 

Pulsed Direct Flame Deposition and Thermal Annealing of Transparent Amorphous Indium Zinc Oxide Films As Active Layers in Field Effect Transistors

ACS Applied Materials & Interfaces, 6, 12245–12251

(2014)

 
  • Marcus Baum
  • Sebastian Polster
  • Michael P. M. Jank
  • Ilya Alexeev
  • Lothar Frey
  • Lothar Schmidt

Laser Melting of Nanoparticulate Transparent Conductive Oxide Thin Films

Journal of Laser Micro/Nanoengineering, 8, 144–148

(2013)

 
  • Nadja Kölpin
  • Moritz Wegener
  • Erik Teuber
  • Sebastian Polster
  • Lothar Frey
  • Andreas Roosen

Conceptional design of nano-particulate ITO inks for inkjet printing of electron devices

Journal of Materials Science, 48, 1623–1631

(2013)

 

Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures

Microelectronic Engineering, 98, 242–245

(2012)

 
  • Robert Fader
  • Holger Schmitt
  • Mathias Rommel
  • Anton J. Bauer
  • Lothar Frey
  • R. Ji
  • M. Hornung
  • M. Brehm
  • M. Vogler

Novel organic polymer for UV-enhanced substrate conformal imprint lithography

Microelectronic Engineering, 98, 238–241

(2012)

 
  • Holger Schmitt
  • P. Duempelmann
  • Robert Fader
  • Mathias Rommel
  • Anton J. Bauer
  • Lothar Frey
  • M. Brehm
  • A. Kraft

Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography

Microelectronic Engineering, 98, 275–278

(2012)

 
  • Marcus Baum
  • Sebastian Polster
  • Michael P. M. Jank
  • Ilya Alexeev
  • Lothar Frey
  • Michael Schmidt

Efficient laser induced consolidation of nanoparticulate ZnO thin films with reduced thermal budget

Applied Physics A, 107, 269–273

(2012)

 
  • Sabine Walther
  • Sebastian Polster
  • Michael P. M. Jank
  • Heiko Thiem
  • Heiner Ryssel
  • Lothar Frey

Tuning of charge carrier density of ZnO nanoparticle films by oxygen plasma treatment

Advanced Powder Technology, 22, 253–256

(2011)

 
  • Sabine Walther
  • Sebastian Polster
  • Bernhard Meyer
  • Michael P. M. Jank
  • Heiner Ryssel
  • Lothar Frey

Properties of SiO2 and Si3N4 as gate dielectrics for printed ZnO transistors

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 29, 01A601

(2011)

 
  • J. D. Jambreck
  • Vasil Yanev
  • Holger Schmitt
  • Mathias Rommel
  • Anton J. Bauer
  • Lothar Frey

Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy

Microelectronic Engineering, 88, 2584–2588

(2011)

 

Leakage current and defect characterization of p+n-source/drain diodes

Microelectronics Reliability

(2011)

 
  • Albena Paskaleva
  • Martin Lemberger
  • Anton J. Bauer
  • Lothar Frey

Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1−xAlxO2/TiN metal-insulator-metal structures

Journal of Applied Physics, 109, 076101

(2011)

 
  • R. J. Kaiser
  • S. Koffel
  • Peter Pichler
  • Anton J. Bauer
  • B. Amon
  • Lothar Frey
  • Heiner Ryssel

Germanium substrate loss during thermal processing

Microelectronic Engineering, 88, 499–502

(2011)

 
  • Tobias Erlbacher
  • Vasil Yanev
  • Mathias Rommel
  • Anton J. Bauer
  • Lothar Frey

Gate oxide reliability at the nanoscale evaluated by combining conductive atomic force microscopy and constant voltage stress

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 29, 01AB08

(2011)

 
  • A. Fet
  • Volker Häublein
  • Anton J. Bauer
  • Heiner Ryssel
  • Lothar Frey

Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 29, 01A905

(2011)

 
  • S. Koffel
  • R. J. Kaiser
  • Anton J. Bauer
  • B. Amon
  • Peter Pichler
  • Jürgen Lorenz
  • Lothar Frey
  • P. Scheiblin
  • V. Mazzocchi
  • J. P. Barnes
  • A. Claverie

Experiments and simulation of the diffusion and activation of the n-type dopants P, As, and Sb implanted into germanium

Microelectronic Engineering, 88, 458–461

(2011)

 
  • Johannes Laven
  • Hans-Joachim Schulze
  • Volker Häublein
  • Franz-Josef Niedernostheide
  • Heiner Ryssel
  • Lothar Frey

Dopant profiles in silicon created by MeV hydrogen implantation: Influence of annealing parameters

physica status solidi (c), 8, 697–700

(2011)

 
  • Vasil Yanev
  • Mathias Rommel
  • Anton J. Bauer
  • Lothar Frey

Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 29, 01A401

(2011)

 

EPR investigations of non-oxidized silicon nanoparticles from thermal pyrolysis of silane

physica status solidi (RRL) - Rapid Research Letters, 5, 244–246

(2011)

 

Conduction Mechanisms and Environmental Sensitivity of Solution-Processed Silicon Nanoparticle Layers for Thin-Film Transistors

Small, 7, 2853–2857

(2011)

 
  • Guntrade Roll
  • S. Jakschik
  • Matthias Goldbach
  • A. Wachowiak
  • T. Mikolajick
  • Lothar Frey

Analysis of the effect of germanium preamorphization on interface defects and leakage current for high-k metal-oxide-semiconductor field-effect transistor

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 29, 01AA05

(2011)

 
  • Johannes Laven
  • Reinhart Job
  • Hans-Joachim Schulze
  • Franz-Josef Niedernostheide
  • Volker Häublein
  • Holger Schulze
  • Werner Schustereder
  • Heiner Ryssel
  • Lothar Frey

The Impact of Helium Co-Implantation on Hydrogen Induced Donor Profiles in Float Zone Silicon

ECS Transactions, 33, 51–62

(2010)

 
  • A. Fet
  • Volker Häublein
  • Anton J. Bauer
  • Heiner Ryssel
  • Lothar Frey

Modeling of the effective work function instability in metal/high-κ dielectric stacks

Journal of Applied Physics, 107, 124514

(2010)

 
  • Mathias Rommel
  • J. D. Jambreck
  • C. Ebm
  • E. Platzgummer
  • Anton J. Bauer
  • Lothar Frey

Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations

Microelectronic Engineering, 87, 1566–1568

(2010)

 
  • Holger Schmitt
  • Mathias Rommel
  • Anton J. Bauer
  • Lothar Frey
  • A. Bich
  • M. Eisner
  • R. Voelkel
  • M. Hornung

Full wafer microlens replication by UV imprint lithography

Microelectronic Engineering, 87, 1074–1076

(2010)

 
  • J. D. Jambreck
  • Holger Schmitt
  • B. Amon
  • Mathias Rommel
  • Anton J. Bauer
  • Lothar Frey

Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing

Microelectronic Engineering, 87, 1123–1126

(2010)

 
  • J. Hinz
  • Anton J. Bauer
  • T. Thiede
  • R. A. Fischer
  • Lothar Frey

Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks

Semiconductor Science and Technology, 25, 045009

(2010)

 
  • A. Fet
  • Volker Häublein
  • Anton J. Bauer
  • Heiner Ryssel
  • Lothar Frey

Effective work function tuning in high-κ dielectric metal-oxide-semiconductor stacks by fluorine and lanthanide doping

Applied Physics Letters, 96, 053506

(2010)

 

Influence of annealing temperature and measurement ambient on TFTs based on gas phase synthesized ZnO nanoparticles

Microelectronic Engineering, 87, 2312–2316

(2010)

 
  • A. Fet
  • Volker Häublein
  • Anton J. Bauer
  • Heiner Ryssel
  • Lothar Frey

Lanthanum implantation for threshold voltage control in metal/high-k devices

Microelectronic Engineering, 86, 1782–1785

(2009)

 
  • Johannes Müller
  • T. S. Böscke
  • U. Schröder
  • M. Reinicke
  • L. Oberbeck
  • D. Zhou
  • W. Weinreich
  • P. Kücher
  • Martin Lemberger
  • Lothar Frey

Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition

Microelectronic Engineering, 86, 1818–1821

(2009)

 
  • Vasil Yanev
  • Tobias Erlbacher
  • Mathias Rommel
  • Anton J. Bauer
  • Lothar Frey

Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale

Microelectronic Engineering, 86, 1911–1914

(2009)